Single Crystal Orientation Measurement by X-ray Methods
نویسنده
چکیده
Semiconductor substrates made from single crystal materials need to be cut precisely along a fixed axis during the manufacturing process of the semiconductor components. Thus, measuring the crystal orientation is critical. For these measurements, Xray techniques demonstrate the highest precision. This report presents an outline of two popular X-ray diffraction techniques, the diffractometer and the Laue methods.
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